Fuzzy Based Approach for the Parametric Estimation of the Mems Based Thermo Pneumatic Micro Pump
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Abstract
Over the last few decades, technological advancements and the tendency toward miniaturization have resulted in the development of a new subject known as micro-electro-mechanical systems (MEMS). MEMS have many applications but our focus in this research was on MEMS-based thermopneumatic micro pump. It consists of a chamber, loaded withvapors or solution, a diaphragm,and atemperature control system. It has many advantages like low power consumption while maintaining high performance and accurate dose control. MATLAB fuzzy logic controller (FLC) is used for the parametric estimation of the MEMS-based thermopneumatic micropump. The effect of voltage and frequency applied on the micropump were studied on the back pressure and flow rate. The increase in voltages and frequency weredecreasedthe back pressure and fluid flowrate.Similarly, witha decrease in voltages and frequency wereincreasedthe back pressure and fluid flowrate.The difference between the MAMDANI calculated value and the simulated value from the rule viewer is 1.61% for both the output of back pressure and flow rate.
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Pakistan Journal Emerging Science and Technologies (PJEST) in collaboration with Govt. Islamia Graduate College Civil Lines Lahore, Pakistan is licensed under a Creative Commons Attribution-ShareAlike 4.0 International License.
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